微机械元件和仪器新进展*

型计算机相似，微机械器件的优势在于大批量生产带来的价格优势，因此，现在取得商业成功的主要是那些有巨大市场的项目，如力学传感器，但随着各种模块式器件开发，可以期望组合成种类众多的仪器和系统，实现微机械产品的多样化。

　

 

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New Progress of MEMS Component and Instrument

Dalian University of Science and Technology Shao Pei-ge
Changchun Institute of and Optics and Fine Mechanics Wang Li-ding Ren Yan-tong

　

Abstract MEMS component and Instrument are suitable for batch manufacture and have the advantage of low price, high reliability, smaller volume and large-scale integration. In this decade a great progress has been made in the research, development and marketing of this field, which suggests a bright future.

　

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